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Multi-axes ：Customization

Multi-axes ：Customization

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Hiwin Mikrosystem Air bearing stage

Nano accuracy positioning stage developed for semiconductor/FPD industries and features air bearing of new generation. It is leading by using vacuum preloaded air bearing with low consumption, dynamic counter balancing technology and mass compensation algorithm, which enable accurate motion in a thousandth second, decreasing production takt time. Futher-more, friction is eliminated so that equipment reliability is increased.
Hiwin Mikrosystem Linear + Rotary
10 years of product stability and more than 1 year maintenance.

50nm positioning accuracy can be achieved.

Up to 98% more transmission efficiency and 50% of powersaving with combination of direct drive motors and high efficient driver.
Hiwin Mikrosystem Linear Planar Servo Motor
XY table

Closed loop thanks to integrated distance measurement

Air bearing free of wear

No externally measurable magnetic fields

The position accuracy is stable because of low heat generation.

Can be mounted upside down
Hiwin Mikrosystem Multi-axes ：Customization

The standardized positioning axes presented in this catalogue make it possible to handle many kinds of positioning tasks.For positioning tasks, that cannot be solved using standard axes, HIWIN engineers are available to work out an optimized solution for customers. Sampling of customized solutions are shown here. In several example, mechanics are not the only parts customized. For intance, with the planar motors, special software is developed in order to obtain optimal integration of the positioning system to the production process.

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