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Hiwin Mikrosystem Air bearing stage

Nano accuracy positioning stage developed for semiconductor/FPD industries and features air bearing of new generation. It is leading by using vacuum preloaded air bearing with low consumption, dynamic counter balancing technology and mass compensation algorithm, which enable accurate motion in a thousandth second, decreasing production takt time. Futher-more, friction is eliminated so that equipment reliability is increased.
Hiwin Mikrosystem Dual Axis : Customization
FEATURES:

Slight Inertia and fast acceleration

No cogging

Simple assembly
Hiwin Mikrosystem Dual Axis : Standard
FEATURES:

Max. acceleration 50 m/s² (no load).

Max. velocity 5 m/s (no load).

Easy to assemble.

Low cost,small size,high performance.

Suitable for clean room.
Hiwin Mikrosystem Gantry structure ：Customization

With various combinations of standard single-axis stage, it may constitute a number of different itineraries and functional gantry stage. It can shorten product development time course, and also has the advantages of mass production. This type of stage is often used in optoelectronic components, panel displays, medical equipment industries, etc.
Hiwin Mikrosystem Gantry structure ：Standard
FEATURES:

Slight inertia

Simple assembly

Rigid aluminum bridge

Equipped with coreless linear motors
Hiwin Mikrosystem Linear Planar Servo Motor
XY table

Closed loop thanks to integrated distance measurement

Air bearing free of wear

No externally measurable magnetic fields

The position accuracy is stable because of low heat generation.

Can be mounted upside down
Hiwin Mikrosystem Multi-axes ：Customization

The standardized positioning axes presented in this catalogue make it possible to handle many kinds of positioning tasks.For positioning tasks, that cannot be solved using standard axes, HIWIN engineers are available to work out an optimized solution for customers. Sampling of customized solutions are shown here. In several example, mechanics are not the only parts customized. For intance, with the planar motors, special software is developed in order to obtain optimal integration of the positioning system to the production process.
Hiwin Mikrosystem Single Axis : Customization
FEATURES:

High Precision

High Speed Stability
Hiwin Mikrosystem Single Axis Linear Motor System Stage : Standard
FEATURES:

Maximum velocity: 5 m/s

Maximum acceleration: 10G

Stroke: 100 ~ 2700 mm

Repeatability: +/- 1um

linear motor stage

linear motor stage

Hiwin Mikrosystem Air bearing stage

Hiwin Mikrosystem Dual Axis : Customization

Hiwin Mikrosystem Dual Axis : Standard

Hiwin Mikrosystem Gantry structure ：Customization

Hiwin Mikrosystem Gantry structure ：Standard

Hiwin Mikrosystem Linear Planar Servo Motor

Hiwin Mikrosystem Multi-axes ：Customization

Hiwin Mikrosystem Single Axis : Customization

Hiwin Mikrosystem Single Axis Linear Motor System Stage : Standard

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